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Slit Valve for AMAT P5000 – Part No. 0190-02853
Product Overview:
The 0190-02853 Slit Valve is a high-precision component designed for the AMAT (Applied Materials) P5000 series plasma etch and deposition systems. It plays a critical role in maintaining vacuum integrity and ensuring contamination-free wafer transfer between the loadlock and process chambers.
Specifications:
| Parameter | Value |
|---|---|
| Part Number | 0190-02853 |
| Compatible Equipment | AMAT P5000 |
| Function | Chamber Slit Valve |
| Material | Aluminum / Stainless Steel (Varies by version) |
| Vacuum Rating | High-vacuum compatible |
| Dimensions | OEM standard fit |
Key Features:
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✅ OEM-Equivalent Quality: Designed to meet or exceed original equipment manufacturer (OEM) specifications.
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✅ High Vacuum Compatibility: Engineered with vacuum-sealed performance to minimize leakage and particle generation.
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✅ Durable Construction: Built with robust materials to withstand harsh plasma environments and long operation cycles.
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✅ Precise Actuation: Smooth, repeatable opening and closing actions for reliable wafer transfer.
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✅ Cleanroom Certified: Manufactured in ISO-class environments to ensure the highest cleanliness standards.
Applications:
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Used in Applied Materials P5000 series etch and deposition systems.
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Ensures sealed isolation between chambers during wafer transfer processes.
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Helps prevent cross-contamination and maintain process integrity in vacuum environments.
Why Choose This Part?
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Reduces downtime by offering reliable sealing between chambers
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Compatible with existing hardware—no modifications required
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Available with fast lead times and global shipping
Replacement Notes:
To maintain system uptime and process stability, it's recommended to inspect and replace slit valves on a regular preventive maintenance (PM) schedule, especially in high-throughput environments.
